By Kubby

ISBN-10: 0521889251

ISBN-13: 9780521889254

ISBN-10: 1107645794

ISBN-13: 9781107645790

no matter if you're a pupil taking an introductory MEMS path or a working towards engineer who must wake up to hurry speedy on MEMS layout, this useful consultant presents the hands-on adventure had to layout, fabricate and try out MEMS units. you'll easy methods to use foundry multi-project fabrication methods for inexpensive MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a number of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, in addition to workouts and layout demanding situations on the finish of each bankruptcy. suggestions to the layout problem difficulties are supplied online.

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A Guide to Hands-on MEMS Design and Prototyping by Kubby

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